【Technical notes】Fluid–structure interaction analysis of MEMS mirror device
2021.02.26
When the MEMS mirror device is electrostatically driven (using a transducer element), the expected vibration characteristics may not be obtained due to the viscosity of the surrounding air. By using the two way FSI (Fluid-Structure Interaction) analysis of Ansys, it is possible to perform analysis that takes into account the viscosity of air, and obtain highly accurate vibration characteristics of the device.
Fluid-structure interaction analysis using Ansys Mechanical Enterprise and Ansys CFD has the following features.
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Mutual influences can be considered by coupling fluid and structural analysis
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In cases where the influence of the interaction is stronger, the coupled analysis should be considered.
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Detailed understanding of phenomena that are difficult to confirm in experiments
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[C13]Fluid–structure interaction analysis of MEMS mirror device
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2021-02-26 11:08:00
2021-02-26 11:08:00 |
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